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State of the Art has introduced a range of microwave heater sensor chips using platinum on alumina and oxidised silicon. The heater-sensors can be used in applications from microelectronics to biomedical engineering. They can be used to determine thermal resistance of IC chips, variable optical attenuation of arrayed waveguide gratings, and thermal management in miniature chambers (mini-cell arrays). There are two design options available. The TM365 has two thermal sensors in close proximity to the heater for extremely stringent temperature control, while the TM364 is a single sensor design with moderate temperature control. Both designs with operating temperatures up to 250°C. The self-heating operates at below 4mW/°C.