Keithley Instruments has enhanced it's S530 Parametric Test System. It has added the new high throughput switch mainframe for high integrity signal switching, full Kelvin measurements at the probe card for greater low-ohms accuracy, new hardware protection modules that safeguard sensitive system instruments from high voltages, and a complete range of "probes up" system specifications and diagnostic tools. The systems are optimised for use in production parametric test environments that must accommodate a broad mix of products or wherever wide application flexibility and fast test plan development are critical. Two different S530 systems are available: a low current version developed for measuring characteristics such as sub-threshold leakage, gate leakage, etc., and a high voltage version for the difficult breakdown and leakage tests that GaN, SiC, and Si LDMOS power devices demand. The Low Current System (from two to eight SMU channels) provides sub-picoamp measurement resolution and low current guarding all the way to the probe pin. The High Voltage System (from three to seven SMU channels) incorporates a source-measure unit (SMU) capable of sourcing up to 1000V at 20mA (20W max.). When appropriately configured, S530 systems can address all the DC and C‑V measurement applications required in process control monitoring, process reliability monitoring, and device characterisation. S530 parametric test systems are designed to speed and simplify wafer and test plan setup by providing immediate feedback to the engineer throughout test project development. The Automated Characterisation Suite (ACS) software that controls S530 systems streamlines test project development by allowing new test scripts to be tested interactively without compromising throughput in full automatic mode. ACS also provides for off-line test project development and test results analysis. The systems employ Version 4.3 of the powerful ACS software on which several other proven Keithley test systems operate, which improves lab-to-fab correlation and speeds system learning.
