Epson Toyocom has developed a small, high-performance quartz crystal atmospheric pressure sensor that employs an original pressure-sensing structure using QMEMS technology. The new sensor has a cubic volume of only 12.5cc and weighs just 15 grams yet is accurate to within 10Pa (*2), or about 1/10,000 of one bar (*3) and boasts a resolution (*4) of 0.1Pa. This crystal pressure sensor provides both high accuracy and high resolution in a small package, thanks to an extremely stable oscillating frequency provided by the tuning-fork crystal unit, which serves as a pressure-sensing element, and to an original pressure-sensing structure made possible by QMEMS technology.
Hall B6.225