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Product group : Sensors & Transducers
Product Sub-group : Force + pressure sensors
Quartz Crystal Sensor
has cubic volume of 12.5cc, weighs 15 grams
30/10/2008
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Reference: 33387
Epson Toyocom has developed a small, high-performance quartz crystal atmospheric pressure sensor that employs an original pressure-sensing structure using QMEMS technology. The new sensor has a cubic volume of only 12.5cc and weighs just 15 grams yet is accurate to within 10Pa (*2), or about 1/10,000 of one bar (*3) and boasts a resolution (*4) of 0.1Pa. This crystal pressure sensor provides both high accuracy and high resolution in a small package, thanks to an extremely stable oscillating frequency provided by the tuning-fork crystal unit, which serves as a pressure-sensing element, and to an original pressure-sensing structure made possible by QMEMS technology.

Hall B6.225


Epson Toyocom Corporation

421-8 Hino Hino-Shi
191-8501 Tokyo - Japan -
tel: +81-42-587- 7703
fax: +81-42-587-5564

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May 2012